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|Title:||A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms||Authors:||Koh, K.H.
Optical Microelectromechanical Systems
|Issue Date:||2012||Citation:||Koh, K.H.,Lee, C. (2012). A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms. International Conference on Optical MEMS and Nanophotonics : 236-237. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318890||Abstract:||A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications. © 2012 IEEE.||Source Title:||International Conference on Optical MEMS and Nanophotonics||URI:||http://scholarbank.nus.edu.sg/handle/10635/68856||ISBN:||9781457715112||ISSN:||21605033||DOI:||10.1109/OMEMS.2012.6318890|
|Appears in Collections:||Staff Publications|
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