Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2012.6318890
Title: A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
Authors: Koh, K.H.
Lee, C. 
Keywords: Hybrid Actuation
Mirror
Optical Microelectromechanical Systems
Issue Date: 2012
Citation: Koh, K.H.,Lee, C. (2012). A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms. International Conference on Optical MEMS and Nanophotonics : 236-237. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318890
Abstract: A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications. © 2012 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/68856
ISBN: 9781457715112
ISSN: 21605033
DOI: 10.1109/OMEMS.2012.6318890
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