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https://doi.org/10.1109/OMEMS.2012.6318890
| Title: | A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms | Authors: | Koh, K.H. Lee, C. |
Keywords: | Hybrid Actuation Mirror Optical Microelectromechanical Systems |
Issue Date: | 2012 | Citation: | Koh, K.H.,Lee, C. (2012). A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms. International Conference on Optical MEMS and Nanophotonics : 236-237. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318890 | Abstract: | A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications. © 2012 IEEE. | Source Title: | International Conference on Optical MEMS and Nanophotonics | URI: | http://scholarbank.nus.edu.sg/handle/10635/68856 | ISBN: | 9781457715112 | ISSN: | 21605033 | DOI: | 10.1109/OMEMS.2012.6318890 |
| Appears in Collections: | Staff Publications |
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