Please use this identifier to cite or link to this item:
https://doi.org/10.1109/INEC.2013.6466044
DC Field | Value | |
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dc.title | A dual-silicon-nanowire based nanoelectromechanical switch | |
dc.contributor.author | Qian, Y. | |
dc.contributor.author | Lou, L. | |
dc.contributor.author | Pott, V. | |
dc.contributor.author | Tsai, M.J. | |
dc.contributor.author | Lee, C. | |
dc.date.accessioned | 2014-06-19T02:53:15Z | |
dc.date.available | 2014-06-19T02:53:15Z | |
dc.date.issued | 2013 | |
dc.identifier.citation | Qian, Y.,Lou, L.,Pott, V.,Tsai, M.J.,Lee, C. (2013). A dual-silicon-nanowire based nanoelectromechanical switch. Proceedings - Winter Simulation Conference : 350-352. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/INEC.2013.6466044" target="_blank">https://doi.org/10.1109/INEC.2013.6466044</a> | |
dc.identifier.isbn | 9781467348416 | |
dc.identifier.issn | 08917736 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/68788 | |
dc.description.abstract | A dual-silicon-nanowires based nanoelectromechanical (NEMS) switch is fabricated using standard complementary metal-oxide-semiconductor (CMOS) compatible process. The switch comprises a capacitive paddle and two silicon nanowires both connect with the paddle, form a U-shape structure. The high electrostatic force generated from the large capacitive paddle and high flexible structure favor of silicon nanowires result to ultra-low pull-in voltage. The pull-in voltage is measured at 0.9V. According to the preliminary results, this switch demonstrates great potential in decreasing pull-in voltage. © 2013 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/INEC.2013.6466044 | |
dc.source | Scopus | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/INEC.2013.6466044 | |
dc.description.sourcetitle | Proceedings - Winter Simulation Conference | |
dc.description.page | 350-352 | |
dc.description.coden | WSCPD | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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