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Title: An integrated probe sensor for micro-force measurement
Authors: Lu, Z. 
Luo, H.
Chen, P.C.Y. 
Lin, W.
Keywords: Fibre probe
Micro-force sensing
Photonic assembly
Piezoresistive sensor
Surface characterization
Issue Date: 1-Apr-2006
Citation: Lu, Z., Luo, H., Chen, P.C.Y., Lin, W. (2006-04-01). An integrated probe sensor for micro-force measurement. Measurement Science and Technology 17 (4) : 869-875. ScholarBank@NUS Repository.
Abstract: In this paper, we present the design and development of an integrated micro-force-sensing probe with a piezoresistive sensor at its core. By bonding an etched optical fibre on the beam of the core sensor, the dimension of the sensing probe is substantially reduced. Experiments are conducted on a prototype photonic assembly system to qualify and demonstrate the applicability of this sensor. Results from the experiments show that this integrated probe sensor has good sensitivity and linearity, and larger measurement range. Such experimental results provide evidence that the integrated probe sensor represents a cost-effective force-sensing solution for micromanipulation. © 2006 IOP Publishing Ltd.
Source Title: Measurement Science and Technology
ISSN: 09570233
DOI: 10.1088/0957-0233/17/4/036
Appears in Collections:Staff Publications

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