An integrated probe sensor for micro-force measurement

Abstract

In this paper, we present the design and development of an integrated micro-force-sensing probe with a piezoresistive sensor at its core. By bonding an etched optical fibre on the beam of the core sensor, the dimension of the sensing probe is substantially reduced. Experiments are conducted on a prototype photonic assembly system to qualify and demonstrate the applicability of this sensor. Results from the experiments show that this integrated probe sensor has good sensitivity and linearity, and larger measurement range. Such experimental results provide evidence that the integrated probe sensor represents a cost-effective force-sensing solution for micromanipulation. © 2006 IOP Publishing Ltd.