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https://doi.org/10.1109/TADVP.2009.2013658
Title: | Design, fabrication, and assembly of an optical biosensor probe package for OCT (optical coherence tomography) application | Authors: | Premachandran, C.S. Khairyanto, A. Sheng, K.C.W. Singh, J. Teo, J. Yingshun, X. Nanguang, C. Sheppard, C. Olivo, M. |
Keywords: | 3-D MEMS Biomedical optical imaging Biosensor MEMS packaging Micro-electro-mechanical system (MEMS) Micromirror Mirrors Optical coherence tomography (OCT) Optical device fabrication Optical imaging Optical probe Optical scattering Probes Silicon Silicon optical bench (SiOB) |
Issue Date: | 2009 | Citation: | Premachandran, C.S., Khairyanto, A., Sheng, K.C.W., Singh, J., Teo, J., Yingshun, X., Nanguang, C., Sheppard, C., Olivo, M. (2009). Design, fabrication, and assembly of an optical biosensor probe package for OCT (optical coherence tomography) application. IEEE Transactions on Advanced Packaging 32 (2) : 417-422. ScholarBank@NUS Repository. https://doi.org/10.1109/TADVP.2009.2013658 | Abstract: | A miniaturized optical bioprobe package is developed using a 3-D micromirror and is tested for bio-imaging application. A silicon optical bench is designed and micromachined to assemble the fiber, lens, and the 3-D micromirror device. A 45° angle trench is used to place the micromirror to achieve larger scanning range. Trace lines are formed on the optical bench and are connected to silicon micromirror using solder. A GRIN lens with lower numerical aperture has been used to focus the optical beam onto the micromirror. The bioprobe is packaged and is tested in a time domain optical coherence tomography (OCT) setup and optical image is obtained for plant tissue. © 2009 IEEE. | Source Title: | IEEE Transactions on Advanced Packaging | URI: | http://scholarbank.nus.edu.sg/handle/10635/66996 | ISSN: | 15213323 | DOI: | 10.1109/TADVP.2009.2013658 |
Appears in Collections: | Staff Publications |
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