Please use this identifier to cite or link to this item:
Title: Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly
Authors: Xu, Y.
Singh, J.
Premachandran, C.S.
Khairyanto, A.
Chen, K.W.S.
Chen, N. 
Sheppard, C.J.R. 
Olivo, M. 
Issue Date: 1-Dec-2008
Citation: Xu, Y., Singh, J., Premachandran, C.S., Khairyanto, A., Chen, K.W.S., Chen, N., Sheppard, C.J.R., Olivo, M. (2008-12-01). Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly. Journal of Micromechanics and Microengineering 18 (12) : -. ScholarBank@NUS Repository.
Abstract: A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micromirror, gradient refractive index (GRIN) lens and optical fiber on SiOB substrates having prefabricated self-aligned slots. The two-axis scanning micromirror is based on electrothermal actuation with required voltage less than 2 V for mechanical deflections up to 17°. The optical probe was enclosed within a biocompatible, transparent and waterproof polycarbonate tube with a view of in vivo diagnostic applications. The diameter of the miniature probe is less than 4 mm and the length of its rigid part is about 25 mm. The probe engineering and proof of concept of the probe were demonstrated by obtaining en face and three-dimensional OCT images of an IR card used as a standard sample. © 2008 IOP Publishing Ltd.
Source Title: Journal of Micromechanics and Microengineering
ISSN: 09601317
DOI: 10.1088/0960-1317/18/12/125005
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Oct 26, 2020


checked on Oct 26, 2020

Page view(s)

checked on Oct 24, 2020

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.