Please use this identifier to cite or link to this item: https://doi.org/10.1149/1.3431038
DC FieldValue
dc.titleElectrochemical anodization of silicon-on-insulator wafers using an AC
dc.contributor.authorBreese, M.B.H.
dc.contributor.authorAzimi, S.
dc.contributor.authorOw, Y.S.
dc.contributor.authorMangaiyarkarasi, D.
dc.contributor.authorChan, T.K.
dc.contributor.authorJiao, S.
dc.contributor.authorDang, Z.Y.
dc.contributor.authorBlackwood, D.J.
dc.date.accessioned2014-06-17T07:58:20Z
dc.date.available2014-06-17T07:58:20Z
dc.date.issued2010
dc.identifier.citationBreese, M.B.H., Azimi, S., Ow, Y.S., Mangaiyarkarasi, D., Chan, T.K., Jiao, S., Dang, Z.Y., Blackwood, D.J. (2010). Electrochemical anodization of silicon-on-insulator wafers using an AC. Electrochemical and Solid-State Letters 13 (8) : H271-H273. ScholarBank@NUS Repository. https://doi.org/10.1149/1.3431038
dc.identifier.issn10990062
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/64860
dc.description.abstractElectrochemical anodization of bulk silicon has applications in many micromachining processes. However, its use for silicon photonics is limited because silicon-on-insulator (SOI) wafers cannot be anodized using a conventional process because of the buried oxide. We overcome this using an alternating potential to induce an ac across an SOI wafer, treating it as a capacitative structure. The resultant surface roughness is comparable to that obtained using conventional anodization, and uniform etching across a 6 mm exposed surface is obtained with a minimum patterned linewidth of 2.5 μm in the device layer. © 2010 The Electrochemical Society.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1149/1.3431038
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.contributor.departmentMATERIALS SCIENCE AND ENGINEERING
dc.description.doi10.1149/1.3431038
dc.description.sourcetitleElectrochemical and Solid-State Letters
dc.description.volume13
dc.description.issue8
dc.description.pageH271-H273
dc.description.codenESLEF
dc.identifier.isiut000278694500025
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Page view(s)

147
checked on May 12, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.