Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/62398
DC Field | Value | |
---|---|---|
dc.title | Magnetic axial field measurements on a high resolution miniature scanning electron microscope | |
dc.contributor.author | Khursheed, A. | |
dc.date.accessioned | 2014-06-17T06:50:37Z | |
dc.date.available | 2014-06-17T06:50:37Z | |
dc.date.issued | 2000-04 | |
dc.identifier.citation | Khursheed, A. (2000-04). Magnetic axial field measurements on a high resolution miniature scanning electron microscope. Review of Scientific Instruments 71 (4) : 1712-1715. ScholarBank@NUS Repository. | |
dc.identifier.issn | 00346748 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/62398 | |
dc.description.abstract | This article presents magnetic axial field measurements for a high resolution miniature scanning electron microscope (SEM). The experimental results correlate well with simulation predictions. The SEM has a total height of less than 55 mm. Based upon measured axial field distributions, the on-axis spherical and chromatic aberration coefficients for a 1 keV primary beam are predicted to be 0.36 and 0.6 mm, respectively, for a working distance of 7.5 mm. These aberrations are an order of magnitude smaller than those for conventional SEMs with comparable working distance conditions. The SEM design uses an in-specimen chamber permanent magnet objective lens that lies outside vacuum and can easily be replaced. © 2000 American Institute of Physics. | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL ENGINEERING | |
dc.description.sourcetitle | Review of Scientific Instruments | |
dc.description.volume | 71 | |
dc.description.issue | 4 | |
dc.description.page | 1712-1715 | |
dc.description.coden | RSINA | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.