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Title: Improving the speed of scanning electron microscope deflection systems
Authors: Lee, K.W.
Thong, J.T.L. 
Keywords: Electromagnetic deflection
Scanning electron microscope
Issue Date: Nov-1999
Citation: Lee, K.W., Thong, J.T.L. (1999-11). Improving the speed of scanning electron microscope deflection systems. Measurement Science and Technology 10 (11) : 1070-1074. ScholarBank@NUS Repository.
Abstract: A simple technique to characterize the response of a SEM deflection system is described. By measuring the delay in the SEM video signal as the primary beam is deflected and swept over a knife-edge, the transient deflection response can be mapped out. The transfer function of the beam deflection is then approximated by exponential functions and appropriate analogue filters are designed to pre-emphasise the deflection coil drive signal in order to increase the deflection speed. This technique is used to decrease the deflection response time from typically ∼6 μs to ∼0.5 μs, thereby allowing the implementation of non-raster scanning schemes that require fast point-to-point deflection.
Source Title: Measurement Science and Technology
ISSN: 09570233
DOI: 10.1088/0957-0233/10/11/316
Appears in Collections:Staff Publications

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