Please use this identifier to cite or link to this item:
|Title:||Improving the speed of scanning electron microscope deflection systems||Authors:||Lee, K.W.
Scanning electron microscope
|Issue Date:||Nov-1999||Citation:||Lee, K.W., Thong, J.T.L. (1999-11). Improving the speed of scanning electron microscope deflection systems. Measurement Science and Technology 10 (11) : 1070-1074. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/10/11/316||Abstract:||A simple technique to characterize the response of a SEM deflection system is described. By measuring the delay in the SEM video signal as the primary beam is deflected and swept over a knife-edge, the transient deflection response can be mapped out. The transfer function of the beam deflection is then approximated by exponential functions and appropriate analogue filters are designed to pre-emphasise the deflection coil drive signal in order to increase the deflection speed. This technique is used to decrease the deflection response time from typically ∼6 μs to ∼0.5 μs, thereby allowing the implementation of non-raster scanning schemes that require fast point-to-point deflection.||Source Title:||Measurement Science and Technology||URI:||http://scholarbank.nus.edu.sg/handle/10635/62326||ISSN:||09570233||DOI:||10.1088/0957-0233/10/11/316|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.