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|Title:||An analytical model for scanning electron microscope Type I magnetic contrast with energy filtering||Authors:||Chim, W.K.||Issue Date:||1994||Citation:||Chim, W.K. (1994). An analytical model for scanning electron microscope Type I magnetic contrast with energy filtering. Review of Scientific Instruments 65 (2) : 374-382. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1145243||Abstract:||In this article, a theoretical model for type I magnetic contrast calculations in the scanning electron microscope with energy filtering is presented. This model uses an approximate form of the secondary electron (SE) energy distribution by Chung and Everhart [M. S. Chung and T. E. Everhart, J. Appl. Phys. 45, 707 (1974). Closed form analytical expressions for the contrast and quality factors, which take into consideration the work function and field-distance integral of the material being studied, are obtained. This analytical model is compared with that of a more accurate numerical model. Results showed that the contrast and quality factors for the analytical model differed by not more than 20% from the numerical model, with the actual difference depending on the range of filtered SE energies considered. This model has also been extended to the situation of a two-detector (i.e., detector A and B) configuration, in which enhanced magnetic contrast and quality factor can be obtained by operating in the "A-B" mode.||Source Title:||Review of Scientific Instruments||URI:||http://scholarbank.nus.edu.sg/handle/10635/61792||ISSN:||00346748||DOI:||10.1063/1.1145243|
|Appears in Collections:||Staff Publications|
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