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Title: An analytical model for scanning electron microscope Type I magnetic contrast with energy filtering
Authors: Chim, W.K. 
Issue Date: 1994
Citation: Chim, W.K. (1994). An analytical model for scanning electron microscope Type I magnetic contrast with energy filtering. Review of Scientific Instruments 65 (2) : 374-382. ScholarBank@NUS Repository.
Abstract: In this article, a theoretical model for type I magnetic contrast calculations in the scanning electron microscope with energy filtering is presented. This model uses an approximate form of the secondary electron (SE) energy distribution by Chung and Everhart [M. S. Chung and T. E. Everhart, J. Appl. Phys. 45, 707 (1974). Closed form analytical expressions for the contrast and quality factors, which take into consideration the work function and field-distance integral of the material being studied, are obtained. This analytical model is compared with that of a more accurate numerical model. Results showed that the contrast and quality factors for the analytical model differed by not more than 20% from the numerical model, with the actual difference depending on the range of filtered SE energies considered. This model has also been extended to the situation of a two-detector (i.e., detector A and B) configuration, in which enhanced magnetic contrast and quality factor can be obtained by operating in the "A-B" mode.
Source Title: Review of Scientific Instruments
ISSN: 00346748
DOI: 10.1063/1.1145243
Appears in Collections:Staff Publications

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