Please use this identifier to cite or link to this item:
https://doi.org/10.1364/AO.50.002246
DC Field | Value | |
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dc.title | Surface profile measurement in white-light scanning interferometry using a three-chip color CCD | |
dc.contributor.author | Ma, S. | |
dc.contributor.author | Quan, C. | |
dc.contributor.author | Zhu, R. | |
dc.contributor.author | Tay, C.J. | |
dc.contributor.author | Chen, L. | |
dc.date.accessioned | 2014-06-17T06:35:06Z | |
dc.date.available | 2014-06-17T06:35:06Z | |
dc.date.issued | 2011-05-20 | |
dc.identifier.citation | Ma, S., Quan, C., Zhu, R., Tay, C.J., Chen, L. (2011-05-20). Surface profile measurement in white-light scanning interferometry using a three-chip color CCD. Applied Optics 50 (15) : 2246-2254. ScholarBank@NUS Repository. https://doi.org/10.1364/AO.50.002246 | |
dc.identifier.issn | 00036935 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/61435 | |
dc.description.abstract | White-light scanning interferometry (WLSI) is a useful technique to measure surface profile when a test object contains discontinuous structures or microstructures. A black and white CCD camera is usually utilized to capture interferograms, and a series of corresponding algorithms is used to achieve the profile measurement. However, the color information in the interferograms is lost. A novel profile measurement method that uses phase information in different color channels (red-green-blue) of an interferogram obtained using a three-chip color CCD in WLSI is proposed. The phase values are extracted by a windowed Fourier transform algorithm. Simulation and experimental results are presented to demonstrate the validity of the proposed method. © 2011 Optical Society of America. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1364/AO.50.002246 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1364/AO.50.002246 | |
dc.description.sourcetitle | Applied Optics | |
dc.description.volume | 50 | |
dc.description.issue | 15 | |
dc.description.page | 2246-2254 | |
dc.description.coden | APOPA | |
dc.identifier.isiut | 000291094300015 | |
Appears in Collections: | Staff Publications |
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