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https://doi.org/10.1117/1.1906003
| Title: | Optical micro-shadowgraph-based method for measuring micro-solderball height | Authors: | Wang, S. Quan, C. Tay, C.J. |
Keywords: | Geometrical optics Metrology Micro-solderballs Microscopy Optical shadowgraphs Semiconductor wafers |
Issue Date: | May-2005 | Citation: | Wang, S., Quan, C., Tay, C.J. (2005-05). Optical micro-shadowgraph-based method for measuring micro-solderball height. Optical Engineering 44 (5) : 1-2. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1906003 | Abstract: | An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained. © 2005 Society of Photo-Optical Instrumentation Engineers. | Source Title: | Optical Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/61010 | ISSN: | 00913286 | DOI: | 10.1117/1.1906003 |
| Appears in Collections: | Staff Publications |
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