Please use this identifier to cite or link to this item: https://doi.org/10.1117/1.1906003
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dc.titleOptical micro-shadowgraph-based method for measuring micro-solderball height
dc.contributor.authorWang, S.
dc.contributor.authorQuan, C.
dc.contributor.authorTay, C.J.
dc.date.accessioned2014-06-17T06:29:56Z
dc.date.available2014-06-17T06:29:56Z
dc.date.issued2005-05
dc.identifier.citationWang, S., Quan, C., Tay, C.J. (2005-05). Optical micro-shadowgraph-based method for measuring micro-solderball height. Optical Engineering 44 (5) : 1-2. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1906003
dc.identifier.issn00913286
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/61010
dc.description.abstractAn optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained. © 2005 Society of Photo-Optical Instrumentation Engineers.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/1.1906003
dc.sourceScopus
dc.subjectGeometrical optics
dc.subjectMetrology
dc.subjectMicro-solderballs
dc.subjectMicroscopy
dc.subjectOptical shadowgraphs
dc.subjectSemiconductor wafers
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1117/1.1906003
dc.description.sourcetitleOptical Engineering
dc.description.volume44
dc.description.issue5
dc.description.page1-2
dc.description.codenOPEGA
dc.identifier.isiut000232590600006
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