Please use this identifier to cite or link to this item:
|Title:||Optical micro-shadowgraph-based method for measuring micro-solderball height||Authors:||Wang, S.
|Issue Date:||May-2005||Citation:||Wang, S., Quan, C., Tay, C.J. (2005-05). Optical micro-shadowgraph-based method for measuring micro-solderball height. Optical Engineering 44 (5) : 1-2. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1906003||Abstract:||An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained. © 2005 Society of Photo-Optical Instrumentation Engineers.||Source Title:||Optical Engineering||URI:||http://scholarbank.nus.edu.sg/handle/10635/61010||ISSN:||00913286||DOI:||10.1117/1.1906003|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Oct 10, 2019
checked on Oct 13, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.