Please use this identifier to cite or link to this item:
|Title:||Novel InP-based optical MEMS device||Authors:||Tay, C.J.
|Keywords:||InP-based Fabry-Perot membranes
|Issue Date:||2008||Citation:||Tay, C.J., Akkipeddi, R., Gopal, M. (2008). Novel InP-based optical MEMS device. Journal of Micro/ Nanolithography, MEMS, and MOEMS 7 (3) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.2959175||Abstract:||We present a method for the design and fabrication of InPbased free-standing microelectromechanical systems structures, which include microcantilever beams and Fabry-Perot membranes. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing device and micro-Raman spectroscopy technique is used to evaluate surface stresses. The membrane profile is measured using a white-light interferometry technique, and the effect of the structure geometry on residual stress formation is discussed. From the results obtained, we propose a novel filter design that shows minimum surface profile deviation and stresses. © 2008 Society of Photo-Optical Instrumentation Engineers.||Source Title:||Journal of Micro/ Nanolithography, MEMS, and MOEMS||URI:||http://scholarbank.nus.edu.sg/handle/10635/60905||ISSN:||19325150||DOI:||10.1117/1.2959175|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Oct 16, 2019
checked on Oct 13, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.