Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.precisioneng.2005.03.001
DC Field | Value | |
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dc.title | Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry | |
dc.contributor.author | Quan, C. | |
dc.contributor.author | Wang, S.H. | |
dc.contributor.author | Tay, C.J. | |
dc.date.accessioned | 2014-06-17T06:28:18Z | |
dc.date.available | 2014-06-17T06:28:18Z | |
dc.date.issued | 2006-01 | |
dc.identifier.citation | Quan, C., Wang, S.H., Tay, C.J. (2006-01). Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry. Precision Engineering 30 (1) : 23-31. ScholarBank@NUS Repository. https://doi.org/10.1016/j.precisioneng.2005.03.001 | |
dc.identifier.issn | 01416359 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/60870 | |
dc.description.abstract | In this paper, a flexible optical interferometer incorporated with both fast Fourier transform (FFT) and phase-shifting method is developed for three-dimensional (3D) testing of micro-components. Using light interference, microscopic optics, piezoelectric transducer (PZT) nanoscanning and a CCD camera, the proposed system can detect deformation and surface contour in the order of nanometers. An application of the proposed technique is demonstrated using two micro-components: a micro-beam in an accelerometer and a micromirror. The resulting interference fringes that are related to the deformation and surface contour are analyzed using FFT method or three-step phase-shifting method depending on the test surface features. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components. © 2005 Elsevier Inc. All rights reserved. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.precisioneng.2005.03.001 | |
dc.source | Scopus | |
dc.subject | Fast Fourier transform (FFT) | |
dc.subject | Micro-components | |
dc.subject | Non-destructive measurement | |
dc.subject | Optical interferometry | |
dc.subject | Phase-shifting technique | |
dc.subject | Piezoelectric transducer (PZT) | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1016/j.precisioneng.2005.03.001 | |
dc.description.sourcetitle | Precision Engineering | |
dc.description.volume | 30 | |
dc.description.issue | 1 | |
dc.description.page | 23-31 | |
dc.description.coden | PREGD | |
dc.identifier.isiut | 000233790700003 | |
Appears in Collections: | Staff Publications |
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