Please use this identifier to cite or link to this item:
|Title:||Microscopic surface contouring by fringe projection method||Authors:||Quan, C.
Microscopic surface contouring
|Issue Date:||Oct-2002||Citation:||Quan, C., Tay, C.J., He, X.Y., Kang, X., Shang, H.M. (2002-10). Microscopic surface contouring by fringe projection method. Optics and Laser Technology 34 (7) : 547-552. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-3992(02)00070-1||Abstract:||This paper describes the use of optical fringe projection method for 3D surface profile and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror (0.1 mm × 0.1 mm) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring. © 2002 Published by Elsevier Science Ltd.||Source Title:||Optics and Laser Technology||URI:||http://scholarbank.nus.edu.sg/handle/10635/60755||ISSN:||00303992||DOI:||10.1016/S0030-3992(02)00070-1|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 24, 2022
WEB OF SCIENCETM
checked on Sep 15, 2022
checked on Sep 22, 2022
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.