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Title: Microscopic surface contouring by fringe projection method
Authors: Quan, C. 
Tay, C.J. 
He, X.Y.
Kang, X. 
Shang, H.M. 
Keywords: Fringe projection
Microscopic surface contouring
Phase shifting
Issue Date: Oct-2002
Citation: Quan, C., Tay, C.J., He, X.Y., Kang, X., Shang, H.M. (2002-10). Microscopic surface contouring by fringe projection method. Optics and Laser Technology 34 (7) : 547-552. ScholarBank@NUS Repository.
Abstract: This paper describes the use of optical fringe projection method for 3D surface profile and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror (0.1 mm × 0.1 mm) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring. © 2002 Published by Elsevier Science Ltd.
Source Title: Optics and Laser Technology
ISSN: 00303992
DOI: 10.1016/S0030-3992(02)00070-1
Appears in Collections:Staff Publications

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