Microelectromechanical-systems-driven two-layer rotary-blade-based adjustable iris diaphragm

Abstract

We report a miniature adjustable multi-blade iris diaphragm driven by microelectromechanical-systems-based electrostatic rotary microactuators. A proof-of-concept device is designed and fabricated using a silicon-on-insulator micromachining process. The diameter of the developed iris diaphragm aperture is experimentally demonstrated to be able to adjust from 0.45 to 1.56 mm. When used in a miniature camera lens system, the current prototype device is capable of providing an adjustment range of more than three full f /stops. © 2012 Optical Society of America.