In-situ machining of varied-shaped and arrays of microelectrodes using reverse micro-electrodischarge machining

Abstract

Present study aims to investigate the feasibility of in-situ machining varied-shaped and arrays of microelectrodes using reverse micro-EDM. The technique aims to machine holes or varied structures in a foil using conventional micro-EDM, and then reversing the polarity of the conventional micro-EDM set-up to use the foil to fabricate microelectrodes. The advantages of this technique are its relative low cost of setup, its machining speed, as well as the potential for there not to be any dimensional restrictions. The effect of different machining parameters during the process and selection of optimum machining parameters were explored for each stage of the reverse micro-EDM process. Finally, a 2 × 2 micro-punch array with single microelectrode diameter of 50 μm was successfully fabricated out of a 500 μm diameter tungsten carbide electrode using a 200 μm thick copper foil. In addition, microelectrodes with varied shapes have been machined using reverse micro-EDM. © 2012 Inderscience Enterprises Ltd.