Please use this identifier to cite or link to this item:
https://doi.org/10.1088/0960-1317/18/8/085013
DC Field | Value | |
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dc.title | High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating | |
dc.contributor.author | Zhou, G. | |
dc.contributor.author | Du, Y. | |
dc.contributor.author | Zhang, Q. | |
dc.contributor.author | Feng, H. | |
dc.contributor.author | Chau, F.S. | |
dc.date.accessioned | 2014-06-17T06:23:24Z | |
dc.date.available | 2014-06-17T06:23:24Z | |
dc.date.issued | 2008-08-01 | |
dc.identifier.citation | Zhou, G., Du, Y., Zhang, Q., Feng, H., Chau, F.S. (2008-08-01). High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating. Journal of Micromechanics and Microengineering 18 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/18/8/085013 | |
dc.identifier.issn | 09601317 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/60453 | |
dc.description.abstract | In this paper, we report the modeling, fabrication and characterization of a microelectromechanical systems (MEMS)-based sub-wavelength diffraction grating under in-plane motion for high-optical-efficiency high-speed laser-scanning applications. The scanner utilizes in-plane rotational vibration of a planar microstructure to change the orientation of the diffraction grating, hence causing a diffracted laser beam to scan with less dynamic wavefront deformation as compared with conventional scanning micromirrors. An optical efficiency of more than 75% is experimentally achieved with a simple gold-coated binary sub-wavelength grating. When operated in air and electrostatically driven by 45 V dc bias and 84 V peak-to-peak ac voltages, the 1 mm diameter grating is capable of scanning an optical scan angle of 13.7°with a 632.8 nm wavelength incident laser beam at a resonant frequency of 20.35 kHz. The measured optical resolution is around 310 pixels per unidirectional scan. © 2008 IOP Publishing Ltd. | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1088/0960-1317/18/8/085013 | |
dc.description.sourcetitle | Journal of Micromechanics and Microengineering | |
dc.description.volume | 18 | |
dc.description.issue | 8 | |
dc.description.page | - | |
dc.description.coden | JMMIE | |
dc.identifier.isiut | 000257891600015 | |
Appears in Collections: | Staff Publications |
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