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Title: Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting
Authors: Thian, S.C.H. 
Fuh, J.Y.H. 
Wong, Y.S. 
Loh, H.T. 
Gian, P.W.
Tang, Y. 
Issue Date: Aug-2008
Citation: Thian, S.C.H., Fuh, J.Y.H., Wong, Y.S., Loh, H.T., Gian, P.W., Tang, Y. (2008-08). Fabrication of microfluidic channel utilizing silicone rubber with vacuum casting. Microsystem Technologies 14 (8) : 1125-1135. ScholarBank@NUS Repository.
Abstract: Microfluidic patterns of 100 μm in width and 50 μm height were replicated from a master using vacuum casting with silicone rubber. These silicone copies are subjected to thorough analysis for dimensional accuracy against the master pattern. Analysis of experimental results shows repeatability of the silicone rubber molds. To test the limits of vacuum casting with silicone rubber, an attempt was undertaken to replicate 8 μm microchannel and submicron features. The results show that casting of microfluidic channel via vacuum casting has high repeatability. © 2008 Springer-Verlag.
Source Title: Microsystem Technologies
ISSN: 09467076
DOI: 10.1007/s00542-008-0640-1
Appears in Collections:Staff Publications

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