Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-0233/12/8/340
Title: Determination of deflection and Young's modulus of a micro-beam by means of interferometry
Authors: Wang, S.H. 
Tay, C.J. 
Quan, C. 
Shang, H.M. 
Keywords: Deflection measurement
Fast Fourier transform (FFT)
Interferometry
Micro-beam
Young's modulus
Issue Date: Aug-2001
Citation: Wang, S.H., Tay, C.J., Quan, C., Shang, H.M. (2001-08). Determination of deflection and Young's modulus of a micro-beam by means of interferometry. Measurement Science and Technology 12 (8) : 1279-1286. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/12/8/340
Abstract: In this paper we have developed a technique for testing deflections of a micro-beam in an accelerometer under point-force loads and presented a formula to determine Young's modulus of the micro-beam. The technique is based on optical interferometry. A collimated monochromatic light is directed onto an air-wedge consisting of an optical flat and a micro-beam. A long distance microscope with a CCD camera is utilized to capture the interference fringe pattern that results from recombination of two beams reflected from the optical flat and the micro-beam. The resulting fringe patterns are analysed by the use of fast Fourier transform (FFT) and deflections of the micro-beam are obtained, which are used to calculate Young's modulus. The experimental results show that the proposed technique is relatively simple and accurate, and is a potential method for the evaluation of mechanical properties of micro-components.
Source Title: Measurement Science and Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/59880
ISSN: 09570233
DOI: 10.1088/0957-0233/12/8/340
Appears in Collections:Staff Publications

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