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|Title:||Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe||Authors:||Mu, X.
|Issue Date:||12-Mar-2012||Citation:||Mu, X., Zhou, G., Yu, H., Du, Y., Feng, H., Tsai, J.M.L., Chau, F.S. (2012-03-12). Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe. Optics Express 20 (6) : 6325-6339. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.20.006325||Abstract:||A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevronbeam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection. © 2012 Optical Society of America.||Source Title:||Optics Express||URI:||http://scholarbank.nus.edu.sg/handle/10635/59732||ISSN:||10944087||DOI:||10.1364/OE.20.006325|
|Appears in Collections:||Staff Publications|
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