Modeling of an elastic fin micromotor

Abstract

In the present work, a simplified mathematical model of ultrasonic elastic fin micromotors has been developed. According to the operating principle of this type of motors, motions of rotor in each cycle of stator vibration are divided into several stages based on whether the fin tip and the stator is in contact with slip, contact without slip or separation, respectively. The motion equations of the rotor in each stage are established and derived. The validity range of the model has been discussed through numerical examples. This work provides an initial effort to construct a model for the elastic fin motor by considering dynamical deformation of the rotor as well as intermittent contacts.