Improved spatial phase detection for profilometry using a TDI imager

Abstract

Performance of a time delay and integration (TDI) imager is analogous to a drum/periphery camera. Coupled to a modulated line generating laser diode, it is possible to use a TDI imager to encode the shape profile of a rotating cylindrical object as deformed gratings in a digital image. Among the various methods for extracting the phase from a deformed grating, the spatial phase detection (SPD) method is fast and easy to use. Errors are introduced in this method if the phase gradient is high over a grating interval. Here we propose a method to reduce the phase gradient by using a TDI feature which makes it possible to record images at variable lateral magnification. © 1998 Published by Elsevier Science B.V. All rights reserved.