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Title: Widely tunable work function TaN/Ru stacking layer on HfLaO gate dielectric
Authors: Wang, X.P.
Li, M.-F. 
Yu, H.Y.
Yang, J.J.
Chen, J.D. 
Zhu, C.X. 
Du, A.Y.
Loh, W.Y.
Biesemans, S.
Chin, A.
Lo, G.Q.
Kwong, D.-L.
Keywords: CMOS
Fermi level pinning
High-κ dielectric
Metal gate
Work function
Issue Date: Jan-2008
Citation: Wang, X.P., Li, M.-F., Yu, H.Y., Yang, J.J., Chen, J.D., Zhu, C.X., Du, A.Y., Loh, W.Y., Biesemans, S., Chin, A., Lo, G.Q., Kwong, D.-L. (2008-01). Widely tunable work function TaN/Ru stacking layer on HfLaO gate dielectric. IEEE Electron Device Letters 29 (1) : 50-53. ScholarBank@NUS Repository.
Abstract: For the first time, we demonstrate experimentally that using HfLaO high-κ gate dielectric and vertical stacks of TaN/Ru metal layers, dual metal gates with continuously tunable work function over a very wide range from 3.9 to 5.2 eV, can be achieved after 1000 °C annealing required by a conventional CMOS source/drain activation process. The wide tunability of work function for this bilayermetal structure is attributed to metal interdiffusion during annealing and the release of Fermi level pinning between metal gates (Ru and TaN) and HfLaO. Moreover, this change is thermally stable and unaffected by a subsequent high temperature process. © 2008 IEEE.
Source Title: IEEE Electron Device Letters
ISSN: 07413106
DOI: 10.1109/LED.2007.911608
Appears in Collections:Staff Publications

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