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Title: Tantalum-nitride antifuse electromechanical OTP for embedded memory applications
Authors: Singh, P.
Li, C.G.
Pitchappa, P.
Lee, C. 
Keywords: Embedded memory
nanoelectro-mechanical systems (NEMS)
nonvolatile memory (NVM)
one-time programmable (OTP)
tantalum nitride (TaN)
Issue Date: 2013
Citation: Singh, P., Li, C.G., Pitchappa, P., Lee, C. (2013). Tantalum-nitride antifuse electromechanical OTP for embedded memory applications. IEEE Electron Device Letters 34 (8) : 987-989. ScholarBank@NUS Repository.
Abstract: Embedded nonvolatile memory (NVM) integrated in the back-end of line processes are of high interest, particularly for rugged environments (high temperature/radiation or vibration). This letter demonstrates the use of tantalum nitride microbeams as antifuse one-time programmable (OTP) NVM. It needs a single mask process and can be integrated above an integrated circuit. Typical fusing current is 1 mA, operating voltage is 4 V, and the measured contact resistance is <2kΩ. A hybrid one-transistor/one microbeam/bit memory array is proposed for back-end compatible and low-cost OTP NVM integration. © 1980-2012 IEEE.
Source Title: IEEE Electron Device Letters
ISSN: 07413106
DOI: 10.1109/LED.2013.2262918
Appears in Collections:Staff Publications

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