Please use this identifier to cite or link to this item:
|Title:||Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor||Authors:||Zhang, S.
|Issue Date:||9-Jan-2012||Citation:||Zhang, S., Lou, L., Lee, C. (2012-01-09). Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor. Applied Physics Letters 100 (2) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3675878||Abstract:||We present nanoelectromechanical system based cantilever air flow sensor using silicon nanowires (SiNWs). The cantilever is fabricated in the complementary metal-oxide-semiconductor compatible process with dimension of 90 μm 20 μm 3 μm. SiNWs with the size of 2 μm × 90 nm × 90 nm (length × width × height) are embedded at the edge of the cantilever fixed end to experience the maximum air flow induced strain. Compared with recently reported air flow sensors, our device shows a better sensitivity of 198 Ω/m/s and a flow sensing range up to 65 m/s. In addition, improvements in terms of linearity, hysteresis, and lower power consumption are reported as well. © 2012 American Institute of Physics.||Source Title:||Applied Physics Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/57067||ISSN:||00036951||DOI:||10.1063/1.3675878|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jul 8, 2020
WEB OF SCIENCETM
checked on Jul 1, 2020
checked on Jun 29, 2020
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.