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|Title:||PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection||Authors:||Guo, H.
|Keywords:||Chloroform vapor sensor
nanoelectromechanical systems (NEMS) diaphragm
piezoresistive silicon nanowires (SiNWs)
polydimethylsiloxane (PDMS) film
|Issue Date:||2012||Citation:||Guo, H., Lou, L., Chen, X., Lee, C. (2012). PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection. IEEE Electron Device Letters 33 (7) : 1078-1080. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2012.2195152||Abstract:||A polydimethylsiloxane (PDMS)-coated nanoelectromechanical systems diaphragm embedded with silicon nanowires (SiNWs) is proposed for chloroform vapor detection at room temperature. The PDMS film swells and leads to the deformation of micro-diaphragm when it is exposed to vapor. The SiNWs are connected in a Wheatstone bridge which is used to transform the deformation into a measurable output voltage. This sensor provides good linearity, sensitivity, and repeatability. The sensitivity of our sensor for chloroform vapor detection is 1.41 μV/V/ppm while the power consumption is as low as 2 μW. © 2012 IEEE.||Source Title:||IEEE Electron Device Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/57002||ISSN:||07413106||DOI:||10.1109/LED.2012.2195152|
|Appears in Collections:||Staff Publications|
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