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Title: PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection
Authors: Guo, H.
Lou, L.
Chen, X.
Lee, C. 
Keywords: Chloroform vapor sensor
nanoelectromechanical systems (NEMS) diaphragm
piezoresistive silicon nanowires (SiNWs)
polydimethylsiloxane (PDMS) film
Issue Date: 2012
Citation: Guo, H., Lou, L., Chen, X., Lee, C. (2012). PDMS-coated piezoresistive NEMS diaphragm for chloroform vapor detection. IEEE Electron Device Letters 33 (7) : 1078-1080. ScholarBank@NUS Repository.
Abstract: A polydimethylsiloxane (PDMS)-coated nanoelectromechanical systems diaphragm embedded with silicon nanowires (SiNWs) is proposed for chloroform vapor detection at room temperature. The PDMS film swells and leads to the deformation of micro-diaphragm when it is exposed to vapor. The SiNWs are connected in a Wheatstone bridge which is used to transform the deformation into a measurable output voltage. This sensor provides good linearity, sensitivity, and repeatability. The sensitivity of our sensor for chloroform vapor detection is 1.41 μV/V/ppm while the power consumption is as low as 2 μW. © 2012 IEEE.
Source Title: IEEE Electron Device Letters
ISSN: 07413106
DOI: 10.1109/LED.2012.2195152
Appears in Collections:Staff Publications

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