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Title: Hybrid laser processing for microfabrication of glass
Authors: Sugioka, K.
Obata, K.
Hong, M.H. 
Wu, D.J.
Wong, L.L.
Lu, Y.F. 
Chong, T.C. 
Midorikawa, K.
Issue Date: Jul-2003
Citation: Sugioka, K.,Obata, K.,Hong, M.H.,Wu, D.J.,Wong, L.L.,Lu, Y.F.,Chong, T.C.,Midorikawa, K. (2003-07). Hybrid laser processing for microfabrication of glass. Applied Physics A: Materials Science and Processing 77 (2) : 251-257. ScholarBank@NUS Repository.
Abstract: Hybrid laser processing for the precision microfabrication of glass materials in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. A major role of the medium is to produce strong absorption of the conventional laser beam by the material. Simultaneous irradiation by a vacuum ultraviolet (VUV) laser beam that possesses an extremely small laser fluence and an ultraviolet (UV) laser greatly improves the ablation quality and modification efficiency for fused silica (VUV-UV multiwavelength excitation process). The metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials by the same laser beam, resulting in microstructuring, cutting, color marking, printing, and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.
Source Title: Applied Physics A: Materials Science and Processing
ISSN: 09478396
Appears in Collections:Staff Publications

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