Please use this identifier to cite or link to this item:
|Title:||Hybrid laser processing for microfabrication of glass||Authors:||Sugioka, K.
|Issue Date:||Jul-2003||Citation:||Sugioka, K.,Obata, K.,Hong, M.H.,Wu, D.J.,Wong, L.L.,Lu, Y.F.,Chong, T.C.,Midorikawa, K. (2003-07). Hybrid laser processing for microfabrication of glass. Applied Physics A: Materials Science and Processing 77 (2) : 251-257. ScholarBank@NUS Repository.||Abstract:||Hybrid laser processing for the precision microfabrication of glass materials in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. A major role of the medium is to produce strong absorption of the conventional laser beam by the material. Simultaneous irradiation by a vacuum ultraviolet (VUV) laser beam that possesses an extremely small laser fluence and an ultraviolet (UV) laser greatly improves the ablation quality and modification efficiency for fused silica (VUV-UV multiwavelength excitation process). The metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials by the same laser beam, resulting in microstructuring, cutting, color marking, printing, and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.||Source Title:||Applied Physics A: Materials Science and Processing||URI:||http://scholarbank.nus.edu.sg/handle/10635/56230||ISSN:||09478396|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Mar 31, 2020
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.