Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3665620
DC FieldValue
dc.titleFabrication of large-area ultra-thin single crystal silicon membranes
dc.contributor.authorDang, Z.Y.
dc.contributor.authorMotapothula, M.
dc.contributor.authorOw, Y.S.
dc.contributor.authorVenkatesan, T.
dc.contributor.authorBreese, M.B.H.
dc.contributor.authorRana, M.A.
dc.contributor.authorOsman, A.
dc.date.accessioned2014-06-17T02:49:24Z
dc.date.available2014-06-17T02:49:24Z
dc.date.issued2011-11-28
dc.identifier.citationDang, Z.Y., Motapothula, M., Ow, Y.S., Venkatesan, T., Breese, M.B.H., Rana, M.A., Osman, A. (2011-11-28). Fabrication of large-area ultra-thin single crystal silicon membranes. Applied Physics Letters 99 (22) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3665620
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/55987
dc.description.abstractPerfectly, crystalline, 55 nm thick silicon membranes have been fabricated over several square millimeters and used to observe transmission ion channeling patterns showing the early evolution of the axially channeled beam angular distribution for small tilts away from the [011] axis. The reduced multiple scattering through such thin layers allows fine angular structure produced by the highly non-equilibrium transverse momentum distribution of the channeled beam during its initial propagation in the crystal to be resolved. The membrane crystallinity and flatness were measured by using proton channeling measurements and the surface roughness of 0.4 nm using atomic force microscopy. © 2011 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.3665620
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1063/1.3665620
dc.description.sourcetitleApplied Physics Letters
dc.description.volume99
dc.description.issue22
dc.description.page-
dc.description.codenAPPLA
dc.identifier.isiut000298244500067
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

19
checked on Aug 14, 2019

WEB OF SCIENCETM
Citations

18
checked on Aug 14, 2019

Page view(s)

57
checked on Aug 18, 2019

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.