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https://doi.org/10.1109/TED.2005.856189
| Title: | Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric | Authors: | Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. |
Keywords: | Conduction mechanism Iow-k Porosity |
Issue Date: | Oct-2005 | Citation: | Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A. (2005-10). Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric. IEEE Transactions on Electron Devices 52 (10) : 2333-2339. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2005.856189 | Abstract: | The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and leads to the lowering of the overall breakdown strength. © 2005 IEEE. | Source Title: | IEEE Transactions on Electron Devices | URI: | http://scholarbank.nus.edu.sg/handle/10635/55756 | ISSN: | 00189383 | DOI: | 10.1109/TED.2005.856189 |
| Appears in Collections: | Staff Publications |
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