Please use this identifier to cite or link to this item: https://doi.org/10.1109/TED.2005.856189
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dc.titleEffect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
dc.contributor.authorYiang, K.Y.
dc.contributor.authorYoo, W.J.
dc.contributor.authorKrishnamoorthy, A.
dc.date.accessioned2014-06-17T02:46:46Z
dc.date.available2014-06-17T02:46:46Z
dc.date.issued2005-10
dc.identifier.citationYiang, K.Y., Yoo, W.J., Krishnamoorthy, A. (2005-10). Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric. IEEE Transactions on Electron Devices 52 (10) : 2333-2339. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2005.856189
dc.identifier.issn00189383
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/55756
dc.description.abstractThe incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and leads to the lowering of the overall breakdown strength. © 2005 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/TED.2005.856189
dc.sourceScopus
dc.subjectConduction mechanism
dc.subjectIow-k
dc.subjectPorosity
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/TED.2005.856189
dc.description.sourcetitleIEEE Transactions on Electron Devices
dc.description.volume52
dc.description.issue10
dc.description.page2333-2339
dc.description.codenIETDA
dc.identifier.isiut000232193000030
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