Please use this identifier to cite or link to this item: https://doi.org/10.1049/el.2010.2724
DC FieldValue
dc.titleAdaptive library-based device performance-driven optical proximity correction
dc.contributor.authorTeh, S.H.
dc.contributor.authorHeng, C.H.
dc.contributor.authorTay, A.
dc.date.accessioned2014-06-17T02:36:48Z
dc.date.available2014-06-17T02:36:48Z
dc.date.issued2010-04-01
dc.identifier.citationTeh, S.H., Heng, C.H., Tay, A. (2010-04-01). Adaptive library-based device performance-driven optical proximity correction. Electronics Letters 46 (7) : 513-515. ScholarBank@NUS Repository. https://doi.org/10.1049/el.2010.2724
dc.identifier.issn00135194
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/54901
dc.description.abstractAn adaptive library-based device performance-driven optical proximity correction (OPC) framework for VLSI circuit design is presented. Conventional OPC compensates image distortion by modifying the masks such that final printed shapes resemble the drawn one. Such a mask is typically very complicated; in an earlier work, a device performance-based OPC (DPB-OPC) approach to mask design by matching the device's drive current is proposed which resulted in a simpler corrected mask. However, the iterative approach resulted in significant run-time. In this work, a library-based DPB-OPC approach is developed which makes use of standard cell libraries with pre-characterised DPB-OPC masks to reduce mask design run-time. Simulation using standard benchmark circuits demonstrated run-time reduction of up to 40 times. © 2010 The Institution of Engineering and Technology.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1049/el.2010.2724
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1049/el.2010.2724
dc.description.sourcetitleElectronics Letters
dc.description.volume46
dc.description.issue7
dc.description.page513-515
dc.description.codenELLEA
dc.identifier.isiut000276383700029
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