Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0304-3991(02)00288-7
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dc.titleAberration characteristics of immersion lenses for LVSEM
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-06-17T02:36:19Z
dc.date.available2014-06-17T02:36:19Z
dc.date.issued2002-12
dc.identifier.citationKhursheed, A. (2002-12). Aberration characteristics of immersion lenses for LVSEM. Ultramicroscopy 93 (3-4) : 331-338. ScholarBank@NUS Repository. https://doi.org/10.1016/S0304-3991(02)00288-7
dc.identifier.issn03043991
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/54856
dc.description.abstractThis paper investigates the on-axis aberration characteristics of various immersion objective lenses for low voltage scanning electron microscopy (LVSEM). A simple aperture lens model is used to generate smooth axial field distributions. The simulation results show that mixed field electric-magnetic immersion lenses are predicted to have between 1.5 and 2 times smaller aberration limited probe diameters than their pure-field counterparts. At a landing energy of 1 keV, mixed field immersion lenses operating at the vacuum electrical field breakdown limit are predicted to have on-axis aberration coefficients between 50 and 60 μm, yielding an ultimate image resolution of below 1 nm. These aberrations lie in the same range as those for LVSEM systems that employ aberration correctors. © 2002 Elsevier Science B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0304-3991(02)00288-7
dc.sourceScopus
dc.subjectImmersion lenses
dc.subjectLow voltage scanning electron microscopy (LVSEM)
dc.subjectOn-axis aberrations
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/S0304-3991(02)00288-7
dc.description.sourcetitleUltramicroscopy
dc.description.volume93
dc.description.issue3-4
dc.description.page331-338
dc.description.codenULTRD
dc.identifier.isiut000179694900014
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