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|Title:||A wide-range Parallel Radial Mirror Analyzer for scanning electron/ion microscopes||Authors:||Khursheed, A.
|Keywords:||Auger electron microscopy
Parallel electron energy analyzer
Scanning electron microscope
|Issue Date:||Jan-2012||Citation:||Khursheed, A., Hoang, H.Q., Srinivasan, A. (2012-01). A wide-range Parallel Radial Mirror Analyzer for scanning electron/ion microscopes. Journal of Electron Spectroscopy and Related Phenomena 184 (11-12) : 525-532. ScholarBank@NUS Repository. https://doi.org/10.1016/j.elspec.2011.08.003||Abstract:||This paper presents the design of a wide-range Parallel Radial Mirror Analyzer (RMA) for use as an attachment inside the specimen chambers of scanning electron/ion microscopes. The range of energies for the PRMA typically varies by a factor of 50, and it is predicted to have second-order focusing properties for all electrons/ions that are detected. For a polar angular spread of ±3°, the simulated energy resolution at an energy of 100 eV is around 0.65%, and it drops to less than 0.2% for energies between 300 eV and 5000 eV. The PRMA is predicted to have a transmittance of over an order magnitude better than previous wide-range parallel energy analyzer designs. © 2011 Elsevier B.V. All rights reserved.||Source Title:||Journal of Electron Spectroscopy and Related Phenomena||URI:||http://scholarbank.nus.edu.sg/handle/10635/54852||ISSN:||03682048||DOI:||10.1016/j.elspec.2011.08.003|
|Appears in Collections:||Staff Publications|
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