A multi-beam ion/electron spectra-microscope design

Abstract

This paper presents the design of a multi-beam charged particle instrument that simultaneously focuses electrons, gallium, oxygen and cesium ions onto the same sample. In addition, the instrument has provision to capture the spectra of both secondary electrons and ions in parallel. The mass spectrometer part of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low-energy secondary electrons through to the elastic backscattered electrons. © 2007 Elsevier GmbH. All rights reserved.