Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ijleo.2007.09.003
DC FieldValue
dc.titleA multi-beam ion/electron spectra-microscope design
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-06-16T09:31:14Z
dc.date.available2014-06-16T09:31:14Z
dc.date.issued2009-03
dc.identifier.citationKhursheed, A. (2009-03). A multi-beam ion/electron spectra-microscope design. Optik 120 (6) : 280-288. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijleo.2007.09.003
dc.identifier.issn00304026
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/54445
dc.description.abstractThis paper presents the design of a multi-beam charged particle instrument that simultaneously focuses electrons, gallium, oxygen and cesium ions onto the same sample. In addition, the instrument has provision to capture the spectra of both secondary electrons and ions in parallel. The mass spectrometer part of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low-energy secondary electrons through to the elastic backscattered electrons. © 2007 Elsevier GmbH. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.ijleo.2007.09.003
dc.sourceScopus
dc.subjectCharged particle beams
dc.subjectElectron energy spectrometers
dc.subjectFocused ion beams
dc.subjectMass ion spectrometers
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.ijleo.2007.09.003
dc.description.sourcetitleOptik
dc.description.volume120
dc.description.issue6
dc.description.page280-288
dc.identifier.isiut000264747400006
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