Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSEN.2010.2049991
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dc.titleA miniaturized lamellar grating based Fourier transform spectrometer with electrostatic actuation
dc.contributor.authorShouhua, W.
dc.contributor.authorHongbin, Y.
dc.contributor.authorSiong, C.F.
dc.date.accessioned2014-06-16T09:30:36Z
dc.date.available2014-06-16T09:30:36Z
dc.date.issued2010
dc.identifier.citationShouhua, W., Hongbin, Y., Siong, C.F. (2010). A miniaturized lamellar grating based Fourier transform spectrometer with electrostatic actuation. IEEE Sensors Journal 10 (12) : 1869-1874. ScholarBank@NUS Repository. https://doi.org/10.1109/JSEN.2010.2049991
dc.identifier.issn1530437X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/54387
dc.description.abstractWe report a miniaturized oscillating Fourier transform spectrometer (FTS), of which the novel features are specially designed suspension springs with reduced thickness and a square honey-combed platform which supports the movable grating facets. The proposed design is electrostatically driven by parallel plate actuators at its resonant frequency of 230 Hz. It uses lamellar grating to modulate the incident radiation and the movable part of the grating is capable of bidirectional out-of-plane motion. A maximum displacement of about 100 μm is achieved with an 80 V peak-to-peak driving voltage superimposed on a DC bias of 110 V in ambient pressure. The optical performance of the model is tested using a tunable infrared (IR) laser source. Fringe counting technique is employed in the IR interferogram acquisition process to ensure accurate sampling of the interferogram at constant optical path difference (OPD) intervals. The reconstructed spectra yielded detected wavelengths which deviated by less than 1 nm from the actual wavelengths, indicating excellent wavelength accuracy and an impressive resolving power. © 2006 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/JSEN.2010.2049991
dc.sourceScopus
dc.subjectFourier transform spectrometer (FTS)
dc.subjectlamellar grating
dc.subjectoptical path difference (OPD)
dc.subjectparallel plate actuators
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1109/JSEN.2010.2049991
dc.description.sourcetitleIEEE Sensors Journal
dc.description.volume10
dc.description.issue12
dc.description.page1869-1874
dc.identifier.isiut000283378600009
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