Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LPT.2011.2114877
Title: | A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging | Authors: | Zhang, Q.X. Du, Y. Tan, C.W. Zhang, J. Yu, M.B. Lo, G.-Q. Kwong, D.-L. |
Keywords: | Active alignment lens holder mechanical locking microelectromechanical system (MEMS) packaging Si-photonics |
Issue Date: | 2011 | Citation: | Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L. (2011). A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging. IEEE Photonics Technology Letters 23 (9) : 588-590. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2011.2114877 | Abstract: | This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μ m in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2006 IEEE. | Source Title: | IEEE Photonics Technology Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/54301 | ISSN: | 10411135 | DOI: | 10.1109/LPT.2011.2114877 |
Appears in Collections: | Staff Publications |
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