A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner

Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2011.04.007

Title:	A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
Authors:	Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S.
Keywords:	Diffraction grating Micro scanners Micro-opto- electromechanical systems (MOEMS) Micro-resonators
Issue Date:	10-Aug-2011
Citation:	Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2011-08-10). A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner. Sensors and Actuators, A: Physical 168 (2) : 253-261. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.04.007
Abstract:	This article presents a 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner with an improved grating platform. Detailed optical characterizations of the prototype scanner is measured and reported. The scanner is capable of scanning a laser beam at about 21.5 kHz. The optical resolution of the prototype scanner is measured to be 916 pixels per-unidirectional-scan while scanning in atmosphere. While scanning in vacuum condition, the optical resolution can be estimated to be 1460 pixels per-unidirectional-scan, which is suitable for SXGA (1280 × 1024) resolution scanned beam displays. © 2011 Elsevier B.V. All rights reserved.
Source Title:	Sensors and Actuators, A: Physical
URI:	http://scholarbank.nus.edu.sg/handle/10635/53883
ISSN:	09244247
DOI:	10.1016/j.sna.2011.04.007
Appears in Collections:	Staff Publications

There are no files associated with this item.

Check