Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2005.01.084
DC FieldValue
dc.titleA progress review of proton beam writing applications in microphotonics
dc.contributor.authorBettiol, A.A.
dc.contributor.authorSum, T.C.
dc.contributor.authorCheong, F.C.
dc.contributor.authorSow, C.H.
dc.contributor.authorVenugopal Rao, S.
dc.contributor.authorVan Kan, J.A.
dc.contributor.authorTeo, E.J.
dc.contributor.authorAnsari, K.
dc.contributor.authorWatt, F.
dc.date.accessioned2014-05-19T02:56:24Z
dc.date.available2014-05-19T02:56:24Z
dc.date.issued2005-04
dc.identifier.citationBettiol, A.A., Sum, T.C., Cheong, F.C., Sow, C.H., Venugopal Rao, S., Van Kan, J.A., Teo, E.J., Ansari, K., Watt, F. (2005-04). A progress review of proton beam writing applications in microphotonics. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 364-371. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.084
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/53267
dc.description.abstractThe proton beam writing technique is a direct write lithographic technique that is being actively developed at the Centre for Ion Beam Applications, National University of Singapore for microphotonic applications. The technique utilizes a highly focused beam of MeV protons to pattern or modify the refractive index of various materials including polymers, glasses and other inorganic crystals. The technique has been applied to the fabrication of several different types of microoptical components including waveguides, gratings, microlens arrays and colloidal crystal templates. In this paper we give a review of the progress made thus far by our group and other workers in the field of microphotonics using proton beam writing. © 2005 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nimb.2005.01.084
dc.sourceScopus
dc.subjectGratings
dc.subjectMicrolens arrays
dc.subjectPhotonics
dc.subjectProton beam writing
dc.subjectWaveguides
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.contributor.departmentMATERIALS SCIENCE
dc.description.doi10.1016/j.nimb.2005.01.084
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume231
dc.description.issue1-4
dc.description.page364-371
dc.description.codenNIMBE
dc.identifier.isiut000229752400061
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

52
checked on Oct 17, 2019

WEB OF SCIENCETM
Citations

46
checked on Oct 17, 2019

Page view(s)

107
checked on Oct 13, 2019

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.