Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2374809
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dc.titleMicrolens array fabrication by laser interference lithography for super-resolution surface nanopatterning
dc.contributor.authorLim, C.S.
dc.contributor.authorHong, M.H.
dc.contributor.authorLin, Y.
dc.contributor.authorXie, Q.
dc.contributor.authorLuk'Yanchuk, B.S.
dc.contributor.authorSenthil Kumar, A.
dc.contributor.authorRahman, M.
dc.date.accessioned2014-04-24T09:34:57Z
dc.date.available2014-04-24T09:34:57Z
dc.date.issued2006
dc.identifier.citationLim, C.S., Hong, M.H., Lin, Y., Xie, Q., Luk'Yanchuk, B.S., Senthil Kumar, A., Rahman, M. (2006). Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning. Applied Physics Letters 89 (19) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2374809
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/51454
dc.description.abstractA technique for large area and fast speed surface nanopatterning of photopolymer surface with laser irradiation through microlens array (MLA) was demonstrated. The laser beam was split into many focused tiny light spots by a 1 μm diameter MLA fabricated by laser interference lithography followed by reflow and reactive ion etching. The fabricated MLA exhibits excellent uniformity and surface quality. Up to 6 250 000 nanopatterns can be fabricated over an area of 5×5 mm2 under KrF excimer laser single pulse exposure. A spot size down to 78 nm was obtained corresponding to super-resolution of λ3, λ is the incident laser wavelength. © 2006 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.2374809
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1063/1.2374809
dc.description.sourcetitleApplied Physics Letters
dc.description.volume89
dc.description.issue19
dc.description.page-
dc.description.codenAPPLA
dc.identifier.isiut000241960400025
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