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|Title:||Theoretical model of a three plates capacitive pressure sensor||Authors:||Ge, P.
|Issue Date:||2005||Citation:||Ge, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository.||Abstract:||In the design of micro pressure sensors, the deflections of diaphragms are. crucial to conduct performance simulations. This paper discuss two cases of diaphragm deformation in a three plates capacitive pressure sensor: a clamped edge diaphragm under uniform load and a cantilever plate deflects in touch mode operation. Analytical models are proposed to provide a quick estimation of the sensors. Evaluation of these models have been done by comparing the results to that of the finite-element method (FEM). © 2005 IEEE.||Source Title:||Conference Record - IEEE Instrumentation and Measurement Technology Conference||URI:||http://scholarbank.nus.edu.sg/handle/10635/51263||ISBN:||0780388798||ISSN:||10915281|
|Appears in Collections:||Staff Publications|
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