Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.846469
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dc.titleLibrary-based performance-based OPC
dc.contributor.authorTeh, S.-H.
dc.contributor.authorHeng, C.-H.
dc.contributor.authorTay, A.
dc.date.accessioned2014-04-24T08:36:14Z
dc.date.available2014-04-24T08:36:14Z
dc.date.issued2010
dc.identifier.citationTeh, S.-H., Heng, C.-H., Tay, A. (2010). Library-based performance-based OPC. Proceedings of SPIE - The International Society for Optical Engineering 7641 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.846469
dc.identifier.isbn9780819480552
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/51201
dc.description.abstractConventional geometrical EPE-based OPC approach often results in complicated mask and requires expensive computational effort. To address the mask complexity issue, a device performance-based OPC (DPB-OPC) algorithm which operates based on parametric current, rather than desired layout pattern as in conventional OPC, has been proposed to achieve considerable mask data saving. However, the performance gain is currently limited by the comparatively longer run-time. To improve run-time efficiency of the previous work, we present a library-based DPBOPC methodology in the paper. In particular, cell-wise OPC concept is deployed to explore its merit of run-time saving. To counteract the performance degradation shift that caused by different surrounding environment, a localized DPBOPC refinement can be selectively performed. When compared to full chip OPC, substantial run-time reduction is achieved in the benchmark design. © 2010 Copyright SPIE - The International Society for Optical Engineering.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.846469
dc.sourceScopus
dc.subjectDesign-process integration
dc.subjectDevice performance
dc.subjectMask design
dc.subjectNon-rectangular transistor
dc.subjectOPC
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1117/12.846469
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume7641
dc.description.page-
dc.description.codenPSISD
dc.identifier.isiut000285571800028
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