Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2235855
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dc.titleUltrafast-laser-induced parallel phase-change nanolithography
dc.contributor.authorLin, Y.
dc.contributor.authorHong, M.H.
dc.contributor.authorChong, T.C.
dc.contributor.authorLim, C.S.
dc.contributor.authorChen, G.X.
dc.contributor.authorTan, L.S.
dc.contributor.authorWang, Z.B.
dc.contributor.authorShi, L.P.
dc.date.accessioned2014-04-24T07:25:29Z
dc.date.available2014-04-24T07:25:29Z
dc.date.issued2006
dc.identifier.citationLin, Y., Hong, M.H., Chong, T.C., Lim, C.S., Chen, G.X., Tan, L.S., Wang, Z.B., Shi, L.P. (2006). Ultrafast-laser-induced parallel phase-change nanolithography. Applied Physics Letters 89 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2235855
dc.identifier.issn00036951
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/51064
dc.description.abstractA phase-change nanolithography technique is developed to fabricate up to millions of two-/ three-dimensional nanostructures (~50 nm) over a large area at a high speed by combining femtosecond laser, microlens array, and wet etching process. Near-field scanning optical microscopy, electrical force microscopy, and atomic force microscopy were used to characterize optical and electrical properties of crystalline and amorphous states, respectively. Different reactions of both amorphous and crystalline areas in phase-change film to alkaline solution are demonstrated. Multiphoton absorption and ultrashort pulse contribute to nanostructure generation. This method opens up a route for nanodevice fabrication with phase-change material. © 2006 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.2235855
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1063/1.2235855
dc.description.sourcetitleApplied Physics Letters
dc.description.volume89
dc.description.issue4
dc.description.page-
dc.description.codenAPPLA
dc.identifier.isiut000239376500008
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