Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.jmatprotec.2007.04.058
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dc.titleNanopatterning mask fabrication by femtosecond laser irradiation
dc.contributor.authorZhou, Y.
dc.contributor.authorHong, M.H.
dc.contributor.authorFuh, J.Y.H.
dc.contributor.authorLu, L.
dc.contributor.authorLuk'yanchuk, B.S.
dc.contributor.authorLim, C.S.
dc.contributor.authorWang, Z.B.
dc.date.accessioned2014-04-24T07:23:17Z
dc.date.available2014-04-24T07:23:17Z
dc.date.issued2007-10-01
dc.identifier.citationZhou, Y., Hong, M.H., Fuh, J.Y.H., Lu, L., Luk'yanchuk, B.S., Lim, C.S., Wang, Z.B. (2007-10-01). Nanopatterning mask fabrication by femtosecond laser irradiation. Journal of Materials Processing Technology 192-193 : 212-217. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmatprotec.2007.04.058
dc.identifier.issn09240136
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/50989
dc.description.abstractSurface plasmons are photo-coupled quanta of electro excitation at the boundary of a metal and dielectric, which is a charge density wave of free electrons. Another important feature of surface plasmons resonance, in addition to the enhancement of electric field, is the ability to pass through surface structure smaller than incident laser wavelength and makes it have a potential to overcome the diffraction limit resulting in the breakthrough of nanotechnology. For surface plasmon resonance developing a mask with small feature size is vital. In this paper, mask fabrication by laser irradiation on self-assembly silica particles was described. Compared with the theoretical simulation, it is shown that self-assembly particle-assisted nanopatterning can fabricate a mask with very fine features effectively. With a proper particle size, laser wavelength and laser fluence, periodical structures generated can meet the requirement for surface plasmon use. © 2007 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.jmatprotec.2007.04.058
dc.sourceScopus
dc.subjectLaser
dc.subjectNanofabrication
dc.subjectNon-linear absorption
dc.subjectOptical near field
dc.subjectSurface plasmon
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentMECHANICAL ENGINEERING
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.description.doi10.1016/j.jmatprotec.2007.04.058
dc.description.sourcetitleJournal of Materials Processing Technology
dc.description.volume192-193
dc.description.page212-217
dc.description.codenJMPTE
dc.identifier.isiut000249314100032
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