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https://doi.org/10.1142/S0218625X10011085
DC Field | Value | |
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dc.title | Large area parallel surface nanostructuring with laser irradiation through microlens arrays | |
dc.contributor.author | Lim, C.S. | |
dc.contributor.author | Hong, M.H. | |
dc.contributor.author | Lin, Y. | |
dc.contributor.author | Tan, L.S. | |
dc.contributor.author | Kumar, A.S. | |
dc.contributor.author | Rahman, M. | |
dc.date.accessioned | 2014-04-24T07:22:33Z | |
dc.date.available | 2014-04-24T07:22:33Z | |
dc.date.issued | 2010-06 | |
dc.identifier.citation | Lim, C.S., Hong, M.H., Lin, Y., Tan, L.S., Kumar, A.S., Rahman, M. (2010-06). Large area parallel surface nanostructuring with laser irradiation through microlens arrays. Surface Review and Letters 17 (3) : 383-387. ScholarBank@NUS Repository. https://doi.org/10.1142/S0218625X10011085 | |
dc.identifier.issn | 0218625X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/50964 | |
dc.description.abstract | In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed. © 2010 World Scientific Publishing Company. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1142/S0218625X10011085 | |
dc.source | Scopus | |
dc.subject | Microlens arrays | |
dc.subject | nanopatterning | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.contributor.department | NUS NANOSCIENCE & NANOTECH INITIATIVE | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1142/S0218625X10011085 | |
dc.description.sourcetitle | Surface Review and Letters | |
dc.description.volume | 17 | |
dc.description.issue | 3 | |
dc.description.page | 383-387 | |
dc.description.coden | SRLEF | |
dc.identifier.isiut | 000281265100019 | |
Appears in Collections: | Staff Publications |
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