Please use this identifier to cite or link to this item: https://doi.org/10.1142/S0218625X10011085
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dc.titleLarge area parallel surface nanostructuring with laser irradiation through microlens arrays
dc.contributor.authorLim, C.S.
dc.contributor.authorHong, M.H.
dc.contributor.authorLin, Y.
dc.contributor.authorTan, L.S.
dc.contributor.authorKumar, A.S.
dc.contributor.authorRahman, M.
dc.date.accessioned2014-04-24T07:22:33Z
dc.date.available2014-04-24T07:22:33Z
dc.date.issued2010-06
dc.identifier.citationLim, C.S., Hong, M.H., Lin, Y., Tan, L.S., Kumar, A.S., Rahman, M. (2010-06). Large area parallel surface nanostructuring with laser irradiation through microlens arrays. Surface Review and Letters 17 (3) : 383-387. ScholarBank@NUS Repository. https://doi.org/10.1142/S0218625X10011085
dc.identifier.issn0218625X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/50964
dc.description.abstractIn the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed. © 2010 World Scientific Publishing Company.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1142/S0218625X10011085
dc.sourceScopus
dc.subjectMicrolens arrays
dc.subjectnanopatterning
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1142/S0218625X10011085
dc.description.sourcetitleSurface Review and Letters
dc.description.volume17
dc.description.issue3
dc.description.page383-387
dc.description.codenSRLEF
dc.identifier.isiut000281265100019
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