Please use this identifier to cite or link to this item: https://doi.org/10.1109/TSMCC.2005.855527
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dc.titleGeometrical error modeling and compensation using neural networks
dc.contributor.authorTan, K.K.
dc.contributor.authorHuang, S.N.
dc.contributor.authorLim, S.Y.
dc.contributor.authorLeow, Y.P.
dc.contributor.authorLiaw, H.C.
dc.date.accessioned2014-04-24T07:21:36Z
dc.date.available2014-04-24T07:21:36Z
dc.date.issued2006-11
dc.identifier.citationTan, K.K., Huang, S.N., Lim, S.Y., Leow, Y.P., Liaw, H.C. (2006-11). Geometrical error modeling and compensation using neural networks. IEEE Transactions on Systems, Man and Cybernetics Part C: Applications and Reviews 36 (6) : 797-809. ScholarBank@NUS Repository. https://doi.org/10.1109/TSMCC.2005.855527
dc.identifier.issn10946977
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/50933
dc.description.abstractThis paper describes an approach based on neural networks (NNs) for geometrical error modeling and compensation for precision motion systems. A laser interferometer is used to obtain the systematic error measurements of the geometrical errors, based on which an error model may be constructed and, consequently, a model-based compensation may be incorporated in the motion-control system. NNs are used to approximate the components of geometrical errors, thus dispensing with the conventional lookup table. Apart from serving as a more adequate model due to its inherent nonlinear characteristics, the use of NNs also results in less memory requirements to implement the error compensation for a specified precision compared to the use of lookup table. The adequacy and clear benefits of the proposed approach are illustrated via applications to various configurations of precision-positioning stages, including a single-axis, a gantry, and a complete XY stage. © 2006 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/TSMCC.2005.855527
dc.sourceScopus
dc.subjectCompensation
dc.subjectComputer aided engineering
dc.subjectControl systems
dc.subjectLaser beams
dc.subjectNonlinear systems
dc.typeArticle
dc.contributor.departmentMECHANICAL ENGINEERING
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/TSMCC.2005.855527
dc.description.sourcetitleIEEE Transactions on Systems, Man and Cybernetics Part C: Applications and Reviews
dc.description.volume36
dc.description.issue6
dc.description.page797-809
dc.description.codenITCRF
dc.identifier.isiut000241438200008
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