Please use this identifier to cite or link to this item:
https://doi.org/10.1109/TSMCC.2005.855527
DC Field | Value | |
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dc.title | Geometrical error modeling and compensation using neural networks | |
dc.contributor.author | Tan, K.K. | |
dc.contributor.author | Huang, S.N. | |
dc.contributor.author | Lim, S.Y. | |
dc.contributor.author | Leow, Y.P. | |
dc.contributor.author | Liaw, H.C. | |
dc.date.accessioned | 2014-04-24T07:21:36Z | |
dc.date.available | 2014-04-24T07:21:36Z | |
dc.date.issued | 2006-11 | |
dc.identifier.citation | Tan, K.K., Huang, S.N., Lim, S.Y., Leow, Y.P., Liaw, H.C. (2006-11). Geometrical error modeling and compensation using neural networks. IEEE Transactions on Systems, Man and Cybernetics Part C: Applications and Reviews 36 (6) : 797-809. ScholarBank@NUS Repository. https://doi.org/10.1109/TSMCC.2005.855527 | |
dc.identifier.issn | 10946977 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/50933 | |
dc.description.abstract | This paper describes an approach based on neural networks (NNs) for geometrical error modeling and compensation for precision motion systems. A laser interferometer is used to obtain the systematic error measurements of the geometrical errors, based on which an error model may be constructed and, consequently, a model-based compensation may be incorporated in the motion-control system. NNs are used to approximate the components of geometrical errors, thus dispensing with the conventional lookup table. Apart from serving as a more adequate model due to its inherent nonlinear characteristics, the use of NNs also results in less memory requirements to implement the error compensation for a specified precision compared to the use of lookup table. The adequacy and clear benefits of the proposed approach are illustrated via applications to various configurations of precision-positioning stages, including a single-axis, a gantry, and a complete XY stage. © 2006 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/TSMCC.2005.855527 | |
dc.source | Scopus | |
dc.subject | Compensation | |
dc.subject | Computer aided engineering | |
dc.subject | Control systems | |
dc.subject | Laser beams | |
dc.subject | Nonlinear systems | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/TSMCC.2005.855527 | |
dc.description.sourcetitle | IEEE Transactions on Systems, Man and Cybernetics Part C: Applications and Reviews | |
dc.description.volume | 36 | |
dc.description.issue | 6 | |
dc.description.page | 797-809 | |
dc.description.coden | ITCRF | |
dc.identifier.isiut | 000241438200008 | |
Appears in Collections: | Staff Publications |
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