Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ijmachtools.2005.06.004
DC FieldValue
dc.titleFabrication of concave micro lens array using laser patterning and isotropic etching
dc.contributor.authorLim, C.S.
dc.contributor.authorHong, M.H.
dc.contributor.authorKumar, A.S.
dc.contributor.authorRahman, M.
dc.contributor.authorLiu, X.D.
dc.date.accessioned2014-04-24T07:21:13Z
dc.date.available2014-04-24T07:21:13Z
dc.date.issued2006-04
dc.identifier.citationLim, C.S., Hong, M.H., Kumar, A.S., Rahman, M., Liu, X.D. (2006-04). Fabrication of concave micro lens array using laser patterning and isotropic etching. International Journal of Machine Tools and Manufacture 46 (5) : 552-558. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2005.06.004
dc.identifier.issn08906955
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/50920
dc.description.abstractMicro lens arrays are widely used in optical communication and laser-fiber coupling applications. In this paper, a technique to fabricate concave micro lens arrays on glass substrate using a third harmonic Nd:YAG laser direct patterning and followed by chemical wet isotropic etching is presented. The patterning process was done on gold film, which was coated on a glass substrate by using a NC controlled laser ablation tool paths. The glass substrate is then etched by using hydrofluoric acid (HF) solutions whereby the exposed area will be dissolved away by chemical reaction with HF. The type of etching process is an isotropic etching which the etching rate is equal at all direction thus produce hemispherical concave profile on glass. The optimum laser patterning parameters is obtained and the effect of different types of HF solutions on etching efficiency is studied. The surface morphology, 2D and 3D profiles are also measured. Various micro lens diameters are fabricated with different values of lens sag.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.ijmachtools.2005.06.004
dc.sourceScopus
dc.subjectIsotropic etching
dc.subjectLaser patterning
dc.subjectLens sag
dc.subjectMicro lens arrays
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentMECHANICAL ENGINEERING
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.description.doi10.1016/j.ijmachtools.2005.06.004
dc.description.sourcetitleInternational Journal of Machine Tools and Manufacture
dc.description.volume46
dc.description.issue5
dc.description.page552-558
dc.description.codenIMTME
dc.identifier.isiut000236504400010
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

51
checked on Nov 24, 2020

WEB OF SCIENCETM
Citations

40
checked on Nov 24, 2020

Page view(s)

153
checked on Nov 24, 2020

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.