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Title: Design and fabrication of a micromachined resonant gyroscope
Authors: Tay, F.E.H. 
Liang, Y.C. 
Logeeswaran, V.J. 
Issue Date: Oct-1999
Citation: Tay, F.E.H.,Liang, Y.C.,Logeeswaran, V.J. (1999-10). Design and fabrication of a micromachined resonant gyroscope. International Journal of Electronics 86 (10) : 1179-1191. ScholarBank@NUS Repository.
Abstract: The micromachined gyroscope is rapidly gaining popularity as a rate sensor for application in areas such as automotive and aerospace systems, where low power consumption, high sensitivity, low temperature drift and good stability are prerequisites. In this paper, the overall design and fabrication process of a reactive ion-etched inertial resonant gyroscope based on the capacitive sensing principle is reported. The experimental results are also discussed.
Source Title: International Journal of Electronics
ISSN: 00207217
Appears in Collections:Staff Publications

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