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Title: Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications
Authors: LOU LIANG
Keywords: Silicon nanowire, Piezoresistance, Large strain, Fatigue, Pressure sensor, Flow sensor
Issue Date: 17-Aug-2012
Citation: LOU LIANG (2012-08-17). Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications. ScholarBank@NUS Repository.
Abstract: The piezoresistive silicon nanowires (SiNWs) have been extensively studied over the past decades. With huge potential in downsizing devices, they play a critical role in the migration from Micro-electro-mechanical-systems (MEMS) to Nano-electro-mechanical-Systems (NEMS). The SiNWs show merits of relative ease of scaling down, high sensitivity and CMOS compatibility, etc. However, up to date, inconsistencies and debates on the SiNWs piezoresistance still exist, and reports on successful integration of SiNWs into MEMS are quite limited. In this study, we use the top-down approach to fabricate and integrate SiNWs into diaphragm and cantilever structures. The SiNWs performance under an extra large strain range and their fatigue behavior are investigated for the first time. Two NEMS devices, a pressure sensor and a flow sensor, using SiNWs as sensing elements are demonstrated, characterized and optimized. This work pushes the frontier of SiNWs integration for practical applications, and potentially opens up new realms of miniaturized static and dynamic sensing.
Appears in Collections:Ph.D Theses (Open)

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